Study of the surface reactions in ALD hafnium aluminates

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Authors

Nyns, Laura; Delabie, Annelies; Pourtois, Geoffrey; Van Elshocht, Sven; Vinckier, Chris; De Gendt, Stefan

ISSN

0013-4651

Issue

1

Journal

Journal of the Electrochemical Society

Volume

157

Title

Study of the surface reactions in ALD hafnium aluminates

Publication type

Journal article

Embargo date

9999-12-31

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