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New carbon-based thermal stability improvement technique for NiPtSi used in CMOS technology

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1 since deposited on 2021-10-18
Acq. date: 2026-04-08

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1930 since deposited on 2021-10-18
Acq. date: 2026-04-08

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1 since deposited on 2021-10-18
Acq. date: 2026-04-08

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1930 since deposited on 2021-10-18
Acq. date: 2026-04-08

Citations