New carbon-based thermal stability improvement technique for NiPtSi used in CMOS technology

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Authors
Ortolland, Claude; Togo, Mitsuhiro; Rosseel, Erik; Mertens, Sofie; Kittl, Jorge; Lauwers, Anne; Hoffmann, Thomas Y.
Conference
Materials for Advanced Metallization Conference
Title
New carbon-based thermal stability improvement technique for NiPtSi used in CMOS technology
Publication type
Oral presentation
Embargo date
9999-12-31
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