Publication:
Charging and the secondary electron-electron emission on a trench surface: broadening and shift of ion energy spectrum at plasma trench etching
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1868 since deposited on 2021-10-18
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Acq. date: 2026-08-06
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Statistics
Views
1868 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-08-06
Citations