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Integration of an organic ultra low-k (k=2.2) material

dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorZhao, Larry
dc.contributor.authorHuffman, Craig
dc.contributor.authorHeylen, Nancy
dc.contributor.authorFerchichi, Abdelkarim
dc.contributor.authorOno, Y.
dc.contributor.authorNakajima, M.
dc.contributor.authorNakatani, K.
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBeyer, Gerald
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-18T20:00:19Z
dc.date.available2021-10-18T20:00:19Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17759
dc.sourceIIOimport
dc.titleIntegration of an organic ultra low-k (k=2.2) material
dc.typeProceedings paper
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorBeyer, Gerald
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage173
dc.source.endpage184
dc.source.conferenceAdvanced Metallization Conference 2009 - AMC 2009
dc.source.conferencedate13/10/2009
dc.source.conferencelocationBaltimore, MD USA
imec.availabilityPublished - open access


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