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Advanced organic polymers for the aggressive scaling of low-k materials

dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorZhao, Larry
dc.contributor.authorHuffman, Craig
dc.contributor.authorHeylen, Nancy
dc.contributor.authorOno, Yukiharu
dc.contributor.authorNakajima, Michio
dc.contributor.authorNakatani, Koji
dc.contributor.authorBeyer, Gerald
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-18T20:00:44Z
dc.date.available2021-10-18T20:00:44Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17760
dc.sourceIIOimport
dc.titleAdvanced organic polymers for the aggressive scaling of low-k materials
dc.typeProceedings paper
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorBeyer, Gerald
dc.source.peerreviewyes
dc.source.beginpage844
dc.source.endpage845
dc.source.conferenceInternational Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate22/09/2010
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


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