dc.contributor.author | Pantouvaki, Marianna | |
dc.contributor.author | Zhao, Larry | |
dc.contributor.author | Huffman, Craig | |
dc.contributor.author | Heylen, Nancy | |
dc.contributor.author | Ono, Yukiharu | |
dc.contributor.author | Nakajima, Michio | |
dc.contributor.author | Nakatani, Koji | |
dc.contributor.author | Beyer, Gerald | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.date.accessioned | 2021-10-18T20:00:44Z | |
dc.date.available | 2021-10-18T20:00:44Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17760 | |
dc.source | IIOimport | |
dc.title | Advanced organic polymers for the aggressive scaling of low-k materials | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Pantouvaki, Marianna | |
dc.contributor.imecauthor | Heylen, Nancy | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.source.peerreview | yes | |
dc.source.beginpage | 844 | |
dc.source.endpage | 845 | |
dc.source.conference | International Conference on Solid State Devices and Materials - SSDM | |
dc.source.conferencedate | 22/09/2010 | |
dc.source.conferencelocation | Tokyo Japan | |
imec.availability | Published - imec | |