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Impact of crystallization behavior of SrxTiyOz films on electrical properties of metal-insulator-metal capacitors with TiN electrodes
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Impact of crystallization behavior of SrxTiyOz films on electrical properties of metal-insulator-metal capacitors with TiN electrodes
Date
2010
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pawlak, Malgorzata
;
Kaczer, Ben
;
Kim, Min-Soo
;
Popovici, Mihaela Ioana
;
Tomida, Kazuyuki
;
Swerts, Johan
;
Opsomer, Karl
;
Polspoel, Wouter
;
Favia, Paola
;
Vrancken, Christa
;
Demeurisse, Caroline
;
Wang, W.-C.
;
Afanasiev, Valeri
;
Vandervorst, Wilfried
;
Bender, Hugo
;
Debusschere, Ingrid
;
Altimime, Laith
;
Kittl, Jorge
Journal
Applied Physics Letters
Abstract
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1937
since deposited on 2021-10-18
Acq. date: 2025-10-24
Citations
Metrics
Views
1937
since deposited on 2021-10-18
Acq. date: 2025-10-24
Citations