Publication:
Impact of crystallization behavior of SrxTiyOz films on electrical properties of metal-insulator-metal capacitors with TiN electrodes
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1949 since deposited on 2021-10-18
Acq. date: 2026-09-19
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Statistics
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1949 since deposited on 2021-10-18
Acq. date: 2026-09-19
Citations