Impact of line edge roughness on cell-to-cell coupling variability in NAND flash arrays

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Authors
Poliakov, Pavel; Blomme, Pieter; Miranda Corbalan, Miguel; Anchlia, Ankur; Dobrovolny, Petr; Brusamarello, Lucas; Stucchi, Michele; Van Houdt, Jan; Dehaene, Wim
Conference
11th International Conference on Ultimate Integration on Silicon - ULIS
Title
Impact of line edge roughness on cell-to-cell coupling variability in NAND flash arrays
Publication type
Proceedings paper
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