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Impact of line edge roughness on cell-to-cell coupling variability in NAND flash arrays

dc.contributor.authorPoliakov, Pavel
dc.contributor.authorBlomme, Pieter
dc.contributor.authorMiranda Corbalan, Miguel
dc.contributor.authorAnchlia, Ankur
dc.contributor.authorDobrovolny, Petr
dc.contributor.authorBrusamarello, Lucas
dc.contributor.authorStucchi, Michele
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorDehaene, Wim
dc.date.accessioned2021-10-18T20:22:57Z
dc.date.available2021-10-18T20:22:57Z
dc.date.issued2010-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17816
dc.sourceIIOimport
dc.titleImpact of line edge roughness on cell-to-cell coupling variability in NAND flash arrays
dc.typeProceedings paper
dc.contributor.imecauthorBlomme, Pieter
dc.contributor.imecauthorDobrovolny, Petr
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.imecauthorDehaene, Wim
dc.contributor.orcidimecDobrovolny, Petr::0000-0002-1465-481X
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.source.peerreviewno
dc.source.beginpage41
dc.source.endpage44
dc.source.conference11th International Conference on Ultimate Integration on Silicon - ULIS
dc.source.conferencedate17/02/2010
dc.source.conferencelocationGlasgow UK
imec.availabilityPublished - imec


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