TEM analysis in semiconductor industry: R&D examples of future needs

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Authors
Richard, Olivier; Geypen, Jef; Favia, Paola; Verleysen, Eveline; Marrant, Koen; Van Marcke, Patricia; Bender, Hugo
Conference
International Microscopy Congress - IMC17
Title
TEM analysis in semiconductor industry: R&D examples of future needs
Publication type
Meeting abstract
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