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TEM analysis in semiconductor industry: R&D examples of future needs
Publication:
TEM analysis in semiconductor industry: R&D examples of future needs
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Date
2010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Richard, Olivier
;
Geypen, Jef
;
Favia, Paola
;
Verleysen, Eveline
;
Marrant, Koen
;
Van Marcke, Patricia
;
Bender, Hugo
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1920
since deposited on 2021-10-18
Acq. date: 2025-12-10
Citations
Metrics
Views
1920
since deposited on 2021-10-18
Acq. date: 2025-12-10
Citations