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TEM analysis in semiconductor industry: R&D examples of future needs

dc.contributor.authorRichard, Olivier
dc.contributor.authorGeypen, Jef
dc.contributor.authorFavia, Paola
dc.contributor.authorVerleysen, Eveline
dc.contributor.authorMarrant, Koen
dc.contributor.authorVan Marcke, Patricia
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-18T20:49:18Z
dc.date.available2021-10-18T20:49:18Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17881
dc.sourceIIOimport
dc.titleTEM analysis in semiconductor industry: R&D examples of future needs
dc.typeMeeting abstract
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorVan Marcke, Patricia
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.source.peerreviewyes
dc.source.conferenceInternational Microscopy Congress - IMC17
dc.source.conferencedate20/09/2010
dc.source.conferencelocationRio de Janeiro Brasil
imec.availabilityPublished - imec


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