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Channel backscattering coefficient impact on FinFET devices with uniaxial/biaxial strain engineering
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Authors
Rodrigues, Michele
;
Martino, J.A.
;
Collaert, Nadine
;
Simoen, Eddy
;
Claeys, Cor
Conference
11th International Conference on Ultimate Integration on Silicon - ULIS
Title
Channel backscattering coefficient impact on FinFET devices with uniaxial/biaxial strain engineering
Publication type
Proceedings paper
Embargo date
9999-12-31
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