Show simple item record

Optimised diode analysis of electrical silicon substrate properties

dc.contributor.authorCzerwinski, A.
dc.contributor.authorTomaszewski, D.
dc.contributor.authorGibki, J.
dc.contributor.authorBakowski, A.
dc.contributor.authorKlima, K.
dc.contributor.authorKatcki, J.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-09-30T08:02:32Z
dc.date.available2021-09-30T08:02:32Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1788
dc.sourceIIOimport
dc.titleOptimised diode analysis of electrical silicon substrate properties
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage218
dc.source.endpage227
dc.source.conferenceCrystalline Defects and Contamination Control: Their Impact and Control in Device Manufacturing II
dc.source.conferencedate31/08/1997
dc.source.conferencelocationParis France
imec.availabilityPublished - open access
imec.internalnotesECS Proceedings; Vol. 97-22


Files in this item

Thumbnail
Name:
1756.pdf
Size:
375.4Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record