Authors

Sahhaf, Sahar; Degraeve, Robin; Zahid, Mohammed; Groeseneken, Guido

Conference

Materials for End-of-Roadmap Scaling of CMOS Devices

Title

Profiling different kind of generated defects at elevated temperatures in both SiO2 and high-k dielectrics

Publication type

Proceedings paper

Embargo date

9999-12-31