Publication:
Profiling different kind of generated defects at elevated temperatures in both SiO2 and high-k dielectrics
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1943 since deposited on 2021-10-18
8last month
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Acq. date: 2026-08-08
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Statistics
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1943 since deposited on 2021-10-18
8last month
2last week
Acq. date: 2026-08-08
Citations