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Profiling different kind of generated defects at elevated temperatures in both SiO2 and high-k dielectrics
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Profiling different kind of generated defects at elevated temperatures in both SiO2 and high-k dielectrics
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Date
2010
Proceedings Paper
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20456.doc
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sahhaf, Sahar
;
Degraeve, Robin
;
Zahid, Mohammed
;
Groeseneken, Guido
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1931
since deposited on 2021-10-18
Acq. date: 2026-01-09
Citations
Metrics
Views
1931
since deposited on 2021-10-18
Acq. date: 2026-01-09
Citations