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Micro-bridge defects: characterization and root cause analysis

dc.contributor.authorSantoro, Gaetano
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorBraggin, Jennifer
dc.contributor.authorRosslee, Craig
dc.contributor.authorLeray, Philippe
dc.contributor.authorCheng, Shaunee
dc.contributor.authorJehoul, Christiane
dc.contributor.authorSchreutelkamp, Rob
dc.contributor.authorHillel, Noam
dc.date.accessioned2021-10-18T21:15:13Z
dc.date.available2021-10-18T21:15:13Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17942
dc.sourceIIOimport
dc.titleMicro-bridge defects: characterization and root cause analysis
dc.typeProceedings paper
dc.contributor.imecauthorSantoro, Gaetano
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorLeray, Philippe
dc.contributor.imecauthorJehoul, Christiane
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage763820
dc.source.conferenceMetrology, Inspection and Process Control for Microlithography XXIV
dc.source.conferencedate21/02/2010
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol.7638


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