Authors

Selvaraja, Shankar; Bogaerts, Wim; Dumon, Pieter; Van Thourhout, Dries; Baets, Roel

ISSN

1077-260X

Issue

1

Journal

IEEE Journal of Selected Topics in Quantum Electronics

Volume

16

Title

Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology

Publication type

Journal article

Embargo date

9999-12-31