Publication:

Development of ALD HfZrOx with TDEAH, TDEAZ and H2O

Date

2010
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

20858.pdf 156.25 KB

Author(s)

Shi, Xiaoping
;
Tielens, Hilde  
;
Takeoka, Shinji
;
Nakabayashi, Takashi
;
Nyns, Laura  
;
Adelmann, Christoph  
;
Delabie, Annelies  
;
Schram, Tom  
;
Ragnarsson, Lars-Ake  
;
Schaekers, Marc  
;
Date, Lucien  
;
Schreutelkamp, Rob
;
Van Elshocht, Sven  

Journal

Abstract

Description

Statistics

Views

1910 since deposited on 2021-10-18
1last month
Acq. date: 2026-09-11

Citations

Statistics

Views

1910 since deposited on 2021-10-18
1last month
Acq. date: 2026-09-11

Citations