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Heavily doping technology for strained Ge1-xSnx layers
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Authors
Shimura, Yosuke
;
Takeuchi, Shotaro
;
Vincent, Benjamin
;
Eneman, Geert
;
Clarysse, Trudo
;
Vantomme, Andre
;
Dekoster, Johan
;
Caymax, Matty
;
Loo, Roger
;
Nakatsuka, Osamu
;
Zaima, Shigeaki
Conference
71st Fall Meeting of the Japan Society of Applied Physics
Title
Heavily doping technology for strained Ge1-xSnx layers
Publication type
Proceedings paper
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