dc.contributor.author | De Bisschop, Peter | |
dc.contributor.author | Gomez, Jose Ignacio | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-09-30T08:03:39Z | |
dc.date.available | 2021-09-30T08:03:39Z | |
dc.date.issued | 1997 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1797 | |
dc.source | IIOimport | |
dc.title | Quantification of B and As depth profiles with resonant post-ionisation mass spectrometry | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | De Bisschop, Peter | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | De Bisschop, Peter::0000-0002-8297-5076 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 793 | |
dc.source.endpage | 796 | |
dc.source.conference | Secondary Ion Mass Spectrometry - SIMS X : Proceedings of the 10th International Conference | |
dc.source.conferencedate | 2/10/1995 | |
dc.source.conferencelocation | Münster Germany | |
imec.availability | Published - imec | |