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dc.contributor.authorDe Bisschop, Peter
dc.contributor.authorGomez, Jose Ignacio
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-30T08:03:39Z
dc.date.available2021-09-30T08:03:39Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1797
dc.sourceIIOimport
dc.titleQuantification of B and As depth profiles with resonant post-ionisation mass spectrometry
dc.typeProceedings paper
dc.contributor.imecauthorDe Bisschop, Peter
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecDe Bisschop, Peter::0000-0002-8297-5076
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage793
dc.source.endpage796
dc.source.conferenceSecondary Ion Mass Spectrometry - SIMS X : Proceedings of the 10th International Conference
dc.source.conferencedate2/10/1995
dc.source.conferencelocationMünster Germany
imec.availabilityPublished - imec


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