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First evaluation of new advanced SOG 2.0 low-k material

dc.contributor.authorSmirnov, Evgeny
dc.contributor.authorVanstreels, Kris
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorShamiryan, Denis
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorPhillips, Mark
dc.date.accessioned2021-10-18T21:42:35Z
dc.date.available2021-10-18T21:42:35Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18003
dc.sourceIIOimport
dc.titleFirst evaluation of new advanced SOG 2.0 low-k material
dc.typeMeeting abstract
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference; 20th Asian Session - ADMETA
dc.source.conferencedate19/10/2010
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


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