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Light sensitive SiGe MEM resonator for detection and frequency tuning applications

dc.contributor.authorStoffels, Steve
dc.contributor.authorSeveri, Simone
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorMertens, Robert
dc.contributor.authorPuers, Bob
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-18T22:01:30Z
dc.date.available2021-10-18T22:01:30Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18045
dc.sourceIIOimport
dc.titleLight sensitive SiGe MEM resonator for detection and frequency tuning applications
dc.typeProceedings paper
dc.contributor.imecauthorStoffels, Steve
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage691
dc.source.endpage694
dc.source.conference23rd IEEE International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate24/01/2010
dc.source.conferencelocationHong Kong China
imec.availabilityPublished - open access


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