Publication:

Metal hard-mask based double patterning for 22nm and beyond

Date

2010

Proceedings Paper

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Files

19928.pdf 1.56 MB

Author(s)

Struyf, Herbert

;

de Marneffe, Jean-Francois

;

Goossens, Danny

;

Hendrickx, Dirk

;

;

;

Lazzarino, Frederic

;

Milenin, Alexey

;

Shamiryan, Denis

;

Urbanowicz, Adam

;

Vandervorst, Alain

;

Boullart, Werner

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Acq. date: 2026-04-27