Metal hard-mask based double patterning for 22nm and beyond

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Authors
Struyf, Herbert; de Marneffe, Jean-Francois; Goossens, Danny; Hendrickx, Dirk; Huffman, Craig; Kunnen, Eddy; Lazzarino, Frederic; Milenin, Alexey; Shamiryan, Denis; Urbanowicz, Adam; Vandervorst, Alain; Boullart, Werner
Conference
Advanced Metallization Conference 2009 - AMC 2009
Title
Metal hard-mask based double patterning for 22nm and beyond
Publication type
Proceedings paper
Embargo date
9999-12-31
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