Authors

Swerts, Johan; Armini, Silvia; Carbonell, Laure; Delabie, Annelies; Franquet, Alexis; Mertens, Sofie; Schaekers, Marc; Witters, Thomas; Tokei, Zsolt; Beyer, Gerald; Van Elshocht, Sven; Gravey, Virginie; Cockburn, Andrew; Shah, Kavita; Aubuchon, Joseph

Conference

AVS 57th International Symposium & Exhibition

Title

Plasma enhanced atomic layer deposition of ruthenium ultra-thin films for advanced metallization

Publication type

Meeting abstract