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Innovative characterization techniques for ultra-scaled FinFETs

dc.contributor.authorTettamanzi, G.C.
dc.contributor.authorLansbergen, G.P.
dc.contributor.authorVerduijn, J.
dc.contributor.authorRahman, R.
dc.contributor.authorPaul, A.
dc.contributor.authorLee, S.
dc.contributor.authorCollaert, Nadine
dc.contributor.authorBiesemans, Serge
dc.contributor.authorKlimeck, G.
dc.contributor.authorRogge, S.
dc.date.accessioned2021-10-18T22:15:54Z
dc.date.available2021-10-18T22:15:54Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18076
dc.sourceIIOimport
dc.titleInnovative characterization techniques for ultra-scaled FinFETs
dc.typeProceedings paper
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewno
dc.source.beginpage25
dc.source.endpage30
dc.source.conference10th IEEE International Conference on Nanotechnology and Joint Symposium with Nano Korea
dc.source.conferencedate17/08/2010
dc.source.conferencelocationSeoul South Korea
imec.availabilityPublished - imec


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