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Compositional study of BaSrTiO thin films for memory application

dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorOpsomer, Karl
dc.contributor.authorVrancken, Christa
dc.contributor.authorMatero, Raija
dc.contributor.authorTois, Eva
dc.contributor.authorKaczer, Ben
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSwerts, Johan
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorKim, Min-Soo
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorAltimime, Laith
dc.contributor.authorKittl, Jorge
dc.date.accessioned2021-10-18T22:25:08Z
dc.date.available2021-10-18T22:25:08Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18096
dc.sourceIIOimport
dc.titleCompositional study of BaSrTiO thin films for memory application
dc.typeProceedings paper
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.source.peerreviewyes
dc.source.conference41st IEEE Semiconductor Interface Specialists Conference - SISC
dc.source.conferencedate2/12/2010
dc.source.conferencelocationSan Diego, CA USA
dc.identifier.urlhttp://www.ieeesisc.org/
imec.availabilityPublished - imec


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