Solvent-based strip of high dose ion implanted photoresist

No Thumbnail [100%x80]
Metadata
Show full item record
Authors
Tsvetanova, Diana; Vos, Rita; Pohland, Maximilian; Vanstreels, Kris; Franquet, Alexis; Vereecke, Guy; Mertens, Paul; Heyns, Marc
Conference
3rd International Workshop on Plasma Etch and Strip in Microelectronics - PESM
Title
Solvent-based strip of high dose ion implanted photoresist
Publication type
Meeting abstract
Collections