Authors

Urbanowicz, Adam; Shamiryan, Denis; Zaka, Alban; Verdonck, Patrick; De Gendt, Stefan; Baklanov, Mikhaïl

ISSN

0013-4651

Issue

5

Journal

Journal of the Electrochemical Society

Volume

157

Title

Effects of He plasma pre-treatment on low-k damage during post Cu surface ceaning with NH3 plasma

Publication type

Journal article