Publication:
Effect of UV-wavelength on hardening process of porogen-containing and porogen-free ultra-low-k PECVD glasses
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1957 since deposited on 2021-10-18
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Acq. date: 2026-10-06
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Statistics
Views
1957 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-10-06
Citations