Publication:
Effect of UV-wavelength on hardening process of porogen-containing and porogen-free ultra-low-k PECVD glasses
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1951 since deposited on 2021-10-18
Acq. date: 2026-01-07
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Metrics
Views
1951 since deposited on 2021-10-18
Acq. date: 2026-01-07
Citations