Line width roughness mitigation in chemically amplified resist by post-litho processes

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Authors
Vaglio Pret, Alessandro; Gronheid, Roel
ISSN
0167-9317
Issue
5_8
Journal
Microelectronic Engineering
Volume
87
Title
Line width roughness mitigation in chemically amplified resist by post-litho processes
Publication type
Journal article
Embargo date
9999-12-31
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