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Roughness characterization in the frequency domain and LWR mitigation with post-litho processes
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Authors
Vaglio Pret, Alessandro
;
Gronheid, Roel
;
Foubert, Philippe
Conference
Advances in Resist Materials and Processing Technology XXVII
Title
Roughness characterization in the frequency domain and LWR mitigation with post-litho processes
Publication type
Proceedings paper
Embargo date
9999-12-31
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