Publication:

Apparent and steady-state etch rates in thin film etching and underetching of microstructures. II: Characterisation

Date

2010
Journal article
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Author(s)

Van Barel, Gregory
;
Du Bois, Bert  
;
Van Hoof, Rita  
;
De Wachter, Jef
;
De Ceuninck, Ward  
;
Witvrouw, Ann

Journal

Journal of Micromechanics and Microengineering

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