Influence of porosity on electrical properties of low-k dielectrics

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Authors
Van Besien, Els; Pantouvaki, Marianna; Zhao, Larry; De Roest, David; Baklanov, Mikhaïl; Tokei, Zsolt; Beyer, Gerald
Conference
Advanced Metallization Conference - AMC
Title
Influence of porosity on electrical properties of low-k dielectrics
Publication type
Meeting abstract
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