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Influence of porosity on electrical properties of low-k dielectrics
Publication:
Influence of porosity on electrical properties of low-k dielectrics
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Date
2010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Besien, Els
;
Pantouvaki, Marianna
;
Zhao, Larry
;
De Roest, David
;
Baklanov, Mikhaïl
;
Tokei, Zsolt
;
Beyer, Gerald
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1886
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Acq. date: 2025-12-10
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1886
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-10
Citations