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Influence of porosity on electrical properties of low-k dielectrics

dc.contributor.authorVan Besien, Els
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorZhao, Larry
dc.contributor.authorDe Roest, David
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-18T22:50:06Z
dc.date.available2021-10-18T22:50:06Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18151
dc.sourceIIOimport
dc.titleInfluence of porosity on electrical properties of low-k dielectrics
dc.typeMeeting abstract
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference - AMC
dc.source.conferencedate5/10/2010
dc.source.conferencelocationAlbany, NY USA
imec.availabilityPublished - imec


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