Publication:

Natural EUV mask blank defects: evidence, timely detection, analysis and outlook

Date

2010

Proceedings Paper

Simple item page Full metadata Statistics

Files

20605.pdf 865.71 KB

Author(s)

Van Den Heuvel, Dieter

;

Jonckheere, Rik

;

;

;

;

Hendrickx, Eric

;

;

Statistics

1914 since deposited on 2021-10-18

Acq. date: 2026-02-24