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Rare earth materials for semiconductor applications
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Authors
Van Elshocht, Sven
;
Adelmann, Christoph
;
Popovici, Mihaela Ioana
;
Swerts, Johan
;
Delabie, Annelies
;
Nyns, Laura
;
Shi, Xiaoping
;
Tielens, Hilde
;
Brijs, Bert
;
Pourtois, Geoffrey
;
Schram, Tom
;
Pierreux, Dieter
;
Maes, Jan
;
Hardy, An
;
Van Bael, Marlies
;
Kittl, Jorge
Conference
Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 6: New Materials, Processes, and Equipment
Title
Rare earth materials for semiconductor applications
Publication type
Proceedings paper
Embargo date
9999-12-31
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