Publication:

On the process and material sensitivities for high-k based dielectrics

Date

2010

Proceedings Paper

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Files

20667.pdf 116.18 KB

Author(s)

Van Elshocht, Sven

;

Adelmann, Christoph

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Popovici, Mihaela Ioana

;

;

Delabie, Annelies

;

;

;

;

Pourtois, Geoffrey

;

;

Breuil, Laurent

;

Pierreux, Dieter

;

;

;

Van Bael, Marlies

;

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Metrics

1867 since deposited on 2021-10-18

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Acq. date: 2025-12-17