Authors

Van Look, Lieve; Bekaert, Joost; Laenens, Bart; Vandenberghe, Geert; Richter, Jan; Bubke, Karsten; Peters, Jan Hendrik; Schreel, Koen; Dusa, Mircea

Conference

Optical Microlithography XXIII

Title

Experimental study of effect of pellicle on optical proximity fingerprint for 1.35 NA immersion ArF lithography

Publication type

Proceedings paper

Embargo date

9999-12-31