Multiple patterning: a path towards sub-20nm hp

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Authors
Vandenberghe, Geert; Wong, Patrick; Vandenbroeck, Nadia; Bekaert, Joost; Laenens, Bart; De Bisschop, Peter; Versluijs, Janko; Wiaux, Vincent
Conference
Semicon Japan
Title
Multiple patterning: a path towards sub-20nm hp
Publication type
Oral presentation
Embargo date
9999-12-31
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