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Dopant/carrier profiling in nanostructures

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorEyben, Pierre
dc.contributor.authorSchulze, Andreas
dc.contributor.authorMody, Jay
dc.contributor.authorKoelling, Sebastian
dc.contributor.authorKambham, Ajay Kumar
dc.contributor.authorGilbert, Matthieu
dc.date.accessioned2021-10-18T23:24:05Z
dc.date.available2021-10-18T23:24:05Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18223
dc.sourceIIOimport
dc.titleDopant/carrier profiling in nanostructures
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage992
dc.source.endpage993
dc.source.conferenceInternational Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate22/09/2010
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - open access


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