Quantitative observation of Ge-segregation during the Si-passivation of Ge-surfaces.

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Authors
Vandervorst, Wilfried; Koelling, Sebastian; Vincent, Benjamin; Caymax, Matty; Douhard, Bastien
Conference
MRS Spring Meeting Symposium I: Materials for End-of-Roadmap Scaling of CMOS
Title
Quantitative observation of Ge-segregation during the Si-passivation of Ge-surfaces.
Publication type
Oral presentation
Embargo date
9999-12-31
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