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New lithographic requirements for the implant levels in scaled devices
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Authors
Vandeweyer, Tom
;
Baerts, Christina
;
Horiguchi, Naoto
;
Ercken, Monique
Conference
36th International Conference on Micro & Nano Engineering - MNE
Title
New lithographic requirements for the implant levels in scaled devices
Publication type
Oral presentation
Embargo date
9999-12-31
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