dc.contributor.author | Verdonck, Patrick | |
dc.contributor.author | Aresti, Maitane | |
dc.contributor.author | Ferchichi, Abdelkarim | |
dc.contributor.author | Van Besien, Els | |
dc.contributor.author | Stafford, Ben | |
dc.contributor.author | De Roest, David | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.date.accessioned | 2021-10-18T23:41:16Z | |
dc.date.available | 2021-10-18T23:41:16Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18260 | |
dc.source | IIOimport | |
dc.title | The influence of N containing plasmas on low-k films | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Verdonck, Patrick | |
dc.contributor.imecauthor | Van Besien, Els | |
dc.contributor.imecauthor | De Roest, David | |
dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
dc.contributor.orcidimec | Van Besien, Els::0000-0002-5174-2229 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | Materials for Advanced Metalliization Conference - MAM | |
dc.source.conferencedate | 8/03/2010 | |
dc.source.conferencelocation | Mechelen Belgium | |
imec.availability | Published - open access | |