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Influence of the UV Cure on advanced PECVD low-k materials

dc.contributor.authorVerdonck, Patrick
dc.contributor.authorVan Besien, Els
dc.contributor.authorTrompoukis, Christos
dc.contributor.authorVanstreels, Kris
dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorDe Roest, David
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-18T23:42:11Z
dc.date.available2021-10-18T23:42:11Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18262
dc.sourceIIOimport
dc.titleInfluence of the UV Cure on advanced PECVD low-k materials
dc.typeMeeting abstract
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorDe Roest, David
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference. 20th Aisan Session - ADMETA
dc.source.conferencedate19/10/2010
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


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