Publication:
Evaluating k-values for low-k materials after damascene integration: method and results for 90nm half pitch
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1968 since deposited on 2021-10-18
Acq. date: 2026-01-06
Citations
Metrics
Views
1968 since deposited on 2021-10-18
Acq. date: 2026-01-06
Citations