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Evaluating k-values for low-k materials after damascene integration: method and results for 90nm half pitch

dc.contributor.authorVereecke, Bart
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorBeyer, Gerald
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-18T23:43:34Z
dc.date.available2021-10-18T23:43:34Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18265
dc.sourceIIOimport
dc.titleEvaluating k-values for low-k materials after damascene integration: method and results for 90nm half pitch
dc.typeOral presentation
dc.contributor.imecauthorVereecke, Bart
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorTokei, Zsolt
dc.source.peerreviewno
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM
dc.source.conferencedate8/03/2010
dc.source.conferencelocationMechelen Belgium
imec.availabilityPublished - imec


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