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Surface passivation for Si solar cells: a combination of advanced surface cleaning and thermal atomic layer deposition of Al2O3

dc.contributor.authorVermang, Bart
dc.contributor.authorRothschild, Aude
dc.contributor.authorKenis, Karine
dc.contributor.authorWostyn, Kurt
dc.contributor.authorBearda, Twan
dc.contributor.authorRacz, A.
dc.contributor.authorLoozen, Xavier
dc.contributor.authorJohn, Joachim
dc.contributor.authorMertens, Paul
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-18T23:52:52Z
dc.date.available2021-10-18T23:52:52Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18284
dc.sourceIIOimport
dc.titleSurface passivation for Si solar cells: a combination of advanced surface cleaning and thermal atomic layer deposition of Al2O3
dc.typeProceedings paper
dc.contributor.imecauthorVermang, Bart
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecVermang, Bart::0000-0003-2669-2087
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewno
dc.source.beginpage1118
dc.source.endpage1120
dc.source.conference25th European Photovoltaic Solar Energy Conference - EPVSEC
dc.source.conferencedate6/09/2010
dc.source.conferencelocationValencia Spain
dc.identifier.urlhttp://www.photovoltaic-conference.com/
imec.availabilityPublished - imec


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