Authors

De Wolf, Ingrid; Howard, Dave; Rasras, Mahmoud; Lauwers, A.; Maex, Karen; Groeseneken, Guido; Maes, Herman

Issue

10_11

Journal

Microelectronics and Reliability

Volume

37

Title

A reliability study of titanium silicide lines using micro-raman spectroscopy and electron microscopy

Publication type

Journal article

Embargo date

9999-12-31