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Material assessment for uni-axial strained Ge pMOS -1: characterization of GeSn(B) materials
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Authors
Vincent, Benjamin
;
Shimura, Yosuke
;
Takeuchi, Shotaro
;
Nishimura, Tsuyoshi
;
Demeulemeester, Jelle
;
Eneman, Geert
;
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Vantomme, Andre
;
Nakatsuka, Osamu
;
Zaima, Shigeaki
;
Dekoster, Johan
;
Caymax, Matty
;
Loo, Roger
Conference
Workshop: GeSn Developments and Future Applications
Title
Material assessment for uni-axial strained Ge pMOS -1: characterization of GeSn(B) materials
Publication type
Oral presentation
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