Authors

Wang, Gang; Loo, Roger; Takeuchi, Shotaro; Souriau, Laurent; Lin, Vic; Moussa, Alain; Bender, Hugo; De Jaeger, Brice; Ong, Patrick; Lee, Willie; Meuris, Marc; Caymax, Matty; Vandervorst, Wilfried; Blanpain, Bart; Heyns, Marc

ISSN

0040-6090

Issue

9

Journal

Thin Solid Films

Volume

518

Title

Fabrication of high qualtiy Ge virtual substrates by selective epitaxial growth in shallow trench isolated Si (001) trenches

Publication type

Journal article