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Growth of high quality InP layers in STI trenches on Si (001) substrates

dc.contributor.authorWang, Gang
dc.contributor.authorNguyen, Duy
dc.contributor.authorLeys, Maarten
dc.contributor.authorLoo, Roger
dc.contributor.authorRichard, Olivier
dc.contributor.authorBrammertz, Guy
dc.contributor.authorDekoster, Johan
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-19T00:16:27Z
dc.date.available2021-10-19T00:16:27Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18331
dc.sourceIIOimport
dc.titleGrowth of high quality InP layers in STI trenches on Si (001) substrates
dc.typeMeeting abstract
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorDekoster, Johan
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.source.peerreviewyes
dc.source.conference15th International Conference on Metal Organic Vapor Phase Epitaxy - MOVPE
dc.source.conferencedate23/05/2010
dc.source.conferencelocationLake Tahoe, CA USA
imec.availabilityPublished - imec


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