Show simple item record

Exploration of rare earth materials for future interpoly dielectric replacement in Flash memory devices

dc.contributor.authorWellekens, Dirk
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorSwerts, Johan
dc.contributor.authorKittl, Jorge
dc.contributor.authorCacciato, Antonio
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorJurczak, Gosia
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-19T00:22:57Z
dc.date.available2021-10-19T00:22:57Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18344
dc.sourceIIOimport
dc.titleExploration of rare earth materials for future interpoly dielectric replacement in Flash memory devices
dc.typeProceedings paper
dc.contributor.imecauthorWellekens, Dirk
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.source.peerreviewyes
dc.source.beginpage130
dc.source.endpage133
dc.source.conferenceIEEE International Memory Workshop - IMW
dc.source.conferencedate16/05/2010
dc.source.conferencelocationSeoul Korea
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record